The Solaris 150UV is a standalone unit or an added option for the
Solaris 150 RTP System.

Applications Include:

-Pre Gate Oxidation Cleaning

-Pre-Epi Cleaning

-Photoresist Descum

-Growth of Sacrificial Oxides

-Bond Pad Cleaning

-Cleaning of Critical Surfaces

-Hydrocarbon Removal

-High Temperature UV/Ozone Densification

-Hardened Resist Etch Rates>25-50 A/min at room temperature