The Solaris 150UV is a standalone unit or an added option for the
Solaris 150 RTP System.
Applications Include:
-Pre Gate Oxidation Cleaning
-Pre-Epi Cleaning
-Photoresist Descum
-Growth of Sacrificial Oxides
-Bond Pad Cleaning
-Cleaning of Critical Surfaces
-Hydrocarbon Removal
-High Temperature UV/Ozone Densification
-Hardened Resist Etch Rates>25-50 A/min at room temperature